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Wafer Sensor Master

Precision Wireless Measurement Device

ALMD(Advanced Leveling Measurement Device)
 
컨텐츠 이미지
 
“Wafer Sensor Master” by SESO are Bluetooth enabled, wafer-shaped precision measurement devices that measure Vibration, Level, and
Gap in real-time, with measurements made in the wafer moving position. Optimized equipment set-up is achieved by checking robot and
wafer process positions inside the equipment, and supports optimized set-up. It’s now possible to check and verify the progress of PM and
BM in real time!
 
ALMD (Advanced Level Measurement Device) is a wafer-shaped, precision level measurement sensor that measures the structural
inclination of the wafer process position through a 2-axis Gyro Sensor.
Level data is measured in real time, and can be checked to determine normal state.
ALMD is designed with a thickness of under 3.5mm to enable Auto Process and Auto Transfer into all sections
of the latest semiconductor equipment.
- The ALMD is designed with a weight of 150g, similar to the actual wafer weight to prevent robot arm deflection.
It’s possible to check the moving level of the robot arm (Extend, Retract). The level positions of critical process areas within the
equipment can now be checked and verified in real time
 
컨텐츠이미지 DataSheet
 
Hardware Housing Size 300(±0.05)mm
Housing Material Carbon Fiber
Weight 150g
Thickness 3.5(+0.3/-0.2)mm
Operating Pressure <10e^-6 to 760Torr
Operating Temperature 20~60℃
Battery >3hours per charge
SENSOR Accuracy Absolute X, Y ±0.03° within ±7°
Measurement Units degree,milliradian, mm/d, mm/r
Software Type View: Real-Time Vibration, Frequency check, Auto
           mark function
Review : Replay Log File, Auto report function.
Operating System Windows 7, 8, 10
Others Wireless Link Module Bluetooth, Class1, 2.4GHz
Product Components ALMD Sensor, Charging case, Link module, USB cable Charging cable, Software, Carrying case
Calibration Manufacturer recalibration(annually)